Etching a surface with a gas from an active process. The material is removed, vaporised and evacuated by pumping.
Applications :
- Structuring of silicon
- Improvement of adhesion, bonding and finishing for high-temperature plastics such as PTFE, PFA and FEP.
Silicon with an etching mask before plasma treatment.
During the plasma treatment.
After the plasma treatment.
POM example: before plasma treatment
After the plasma treatment.