PLASMA SYSTEM PICO – PLASMA CLEANER

 

Description of the system

Applications :

The Pico plasma system is a system for plasma activation and cleaning with a capacity of 5/8 litres used in the following domains:

  • analysis (SEM, TEM)
  • medical
  • Micro-fluidics (PDMS)
  • research and development
  • textile processing
  • semiconductors
  • treatment of all materials
  • Asbestos analysis
  • electronics
Brochure PICO

  • v1

  • v2

  • v3

123

Point at the image to see the different versions.

For any additional information, contact us

Pico version 1 technical data

Dimensions of the system : L 560 mm, H 320 mm, D 520 mm

Material of the chamber : Borosilicate / Quartz

Dimensions of the chamber : Ø 130 mm, D 300 mm

Material of the chamber: Stainless steel

Dimensions of the chamber: L 160 mm, H 160 mm, D 325 mm

Material of the chamber: Aluminium

Dimensions of the chamber : L 150 mm, H 160 mm, D 325 mm

Gas power supply : 2 gas channels adjustable by mass flow controller (MFC)

Generator: 100kHz/500W or 13.56 MHz/200W/  automatic matching

Vacuum pump: contact us

Part support: 1 platform

Control: Automatic   system via a 9 cm touch screen, software in French, of the Windows type, highly intuitive, very user-friendly.

 

Pico version 2 technical data

Dimensions of the system : L 560 mm, H 600 mm, D 520 mm

Material of the chamber : Borosilicate / Quartz

Dimensions of the chamber : Ø 130 mm, D 300 mm

Material of the chamber: Stainless steel

Dimensions of the chamber: L 160 mm, H 160 mm, D 325 mm

Material of the chamber: Aluminium

Dimensions of the chamber : L 150 mm, H 160 mm, D 325 mm

Gas power supply : 2 gas channels adjustable by mass flow controller (MFC)

Generator: 100kHz/500W or 13.56 MHz/200W/  automatic matching

Vacuum pump: contact us

Part support: 1 to 2 platforms

Control: Automatic   system via a 18 cm touch screen, software in French, of the Windows type, highly intuitive, very user-friendly.

Pico version 3 technical data

Dimensions of the system : L 600 mm, H 1800 mm, D 800 mm

Material of the chamber : Borosilicate / Quartz

Dimensions of the chamber : Ø 130 mm, D 300 mm

Material of the chamber: Stainless steel

Dimensions of the chamber: L 160 mm, H 160 mm, D 325 mm

Material of the chamber: Aluminium

Dimensions of the chamber : L 150 mm, H 160 mm, D 325 mm

Gas power supply : 1 to 4 gas channels adjustable by mass flow controller (MFC)

Generator: 100kHz/500W or 13.56 MHz/200W/  automatic matching or 2.45 GHz/300W

Vacuum pump: contact us

Part support: 1 to 2 platforms

Control: Automatic   system via a 43 cm touch screen, software in French, of the Windows type, highly intuitive, very user-friendly.

Please contact us for any technical questions