PLASMA SYSTEM TETRA 30 / 50 – PLASMA ETCHER
Description of the system
Applications :
The Plasma TETRA 30 /50 systems are plasma activation and cleaning systems of a capacity of 30 / 50 litres used in the following domains :
- analysis (SEM, TEM)
- medical
- sterilisation
- research and development
- textile processing
- semiconductors
- treatment of plastic
Point at the image to see the different versions.
Dimensions of the system : L 600 mm, H 1700 mm, D 800 mm // L 600 mm, H 2100 mm, D 800 mm
- TETRA 30 :
Material of the chamber: Stainless steel
Dimensions of the chamber: L 305 mm, H 300 mm, D 370 mm
Part support: 1 to 4 platforms
Volume of the chamber : about 34 litres
Material of the chamber : Stainless steel
Dimensions of the chamber : L 400 mm, H 140 mm, D 625 mm
Part support: 1 to 4 platforms
Volume of the chamber : about 35 litres
Material of the chamber : Aluminium
Dimensions of the chamber : L 305 mm, H 300 mm, D 370 mm
Part support: 1 to 4 platforms
Volume of the chamber : about 35 litres
Dimensions of the chamber : Ø 280 mm D 325 mm
Part support: Rotary drum
Volume of the chamber : about 34 litres
- TETRA 50 :
Material of the chamber: Stainless steel
Dimensions of the chamber : L 305 mm, H 300 mm, P 625 mm
Part support: 1 to 4 platforms
Volume of the chamber : about 50 litres
Material of the chamber : Aluminium
Dimensions of the chamber : L 305 mm, H 300 mm, P 620 mm
Part support: 1 to 4 platforms
Volume of the chamber : about 50 litres
Dimensions of the chamber : Ø 280 mm D 540 mm
Part support: Rotary drum
Volume of the chamber : about 50 litres
Gas power supply : 1 to 4 gas channels adjustable by mass flow controller (MFC)
Generator : 40/80 kHz / 1000W to 3000W or 13,56 MHz / 300W or 2,45 GHz / 850W
Vacuum pump : Aspiration capacity : 25 à 250 m³/h
Control : Control:Automatic system via a 18 cm touch screen, software in French, of the Windows type, highly intuitive, very user-friendly.
Dimensions of the system : L 600 mm, H 1700 mm, D 800 mm // L 600 mm, H 2100 mm, D 800 mm
- TETRA 30 :
Material of the chamber: Stainless steel
Dimensions of the chamber: L 305 mm, H 305 mm, D 370 mm
Part support: 1 to 4 platforms
Volume of the chamber : about 34 litres
Material of the chamber : Stainless steel
Dimensions of the chamber : L 400 mm, H 140 mm, D 625 mm
Part support: 1 to 4 platforms
Volume of the chamber : about 35 litres
Material of the chamber : Aluminium
Dimensions of the chamber : L 305 mm, H 300 mm, D 370 mm
Part support: 1 to 4 platforms
Volume of the chamber : about 35 litres
Dimensions of the chamber : Ø 280 mm D 325 mm
Part support: Rotary drum
Volume of the chamber : about 34 litres
- TETRA 50 :
Material of the chamber: Stainless steel
Dimensions of the chamber : L 305 mm, H 300 mm, P 625 mm
Part support: 1 to 4 platforms
Volume of the chamber : about 50 litres
Material of the chamber : Aluminium
Dimensions of the chamber : L 305 mm, H 300 mm, P 620 mm
Part support: 1 to 4 platforms
Volume of the chamber : about 50 litres
Dimensions of the chamber : Ø 280 mm D 540 mm
Part support: Rotary drum
Volume of the chamber : about 50 litres
Gas power supply : 1 to 4 gas channels adjustable by mass flow controller (MFC)
Generator : 40/80 kHz / 1000W to 3000W or 13,56 MHz / 300W or 2,45 GHz / 850W
Vacuum pump : Aspiration capacity : 25 à 250 m³/h
Control : Control:Automatic system via a 43 cm touch screen, software in French, of the Windows type, highly intuitive, very user-friendly.
Please contact us for any technical questions