PLASMA SYSTEM TETRA 30 / 50 – PLASMA ETCHER

Description of the system

Applications :

The Plasma TETRA 30 /50 systems are plasma activation and cleaning systems of a capacity of 30 / 50 litres used in the following domains :

  • analysis (SEM, TEM)
  • medical
  • sterilisation
  • research and development
  • textile processing
  • semiconductors
  • treatment of plastic

Point at the image to see the different versions.

Technical data Tetra 30 / 50 version 1

Dimensions of the system : L  600 mm, H 1700 mm, D 800 mm // L  600 mm, H 2100 mm, D 800 mm

  • TETRA 30 :

Material of the chamberStainless steel

Dimensions of the chamber: L 305 mm, H 300 mm, D 370 mm

Part support: 1 to 4 platforms

Volume of the chamber : about 34 litres

Material of the chamber : Stainless steel

Dimensions of the chamber : L 400 mm, H 140 mm, D 625 mm

Part support: 1 to 4 platforms

Volume of the chamber : about 35 litres

Material of the chamber : Aluminium

Dimensions of the chamber : L 305 mm, H 300 mm, D 370 mm

Part support: 1 to 4 platforms

Volume of the chamber : about 35 litres

Dimensions of the chamber : Ø 280 mm D 325 mm

Part supportRotary drum

Volume of the chamber : about 34 litres

  • TETRA 50 :

Material of the chamberStainless steel

Dimensions of the chamber : L 305 mm, H 300 mm, P 625 mm

Part support: 1 to 4 platforms

Volume of the chamber : about 50 litres

Material of the chamber : Aluminium

Dimensions of the chamber : L 305 mm, H 300 mm, P 620 mm

Part support: 1 to 4 platforms

Volume of the chamber : about 50 litres

Dimensions of the chamber : Ø 280 mm D 540 mm

Part supportRotary drum

Volume of the chamber : about 50 litres

Gas power supply : 1 to 4 gas channels adjustable by mass flow controller (MFC)

Generator : 40/80 kHz / 1000W to 3000W or 13,56 MHz / 300W or 2,45 GHz / 850W

Vacuum pump  Aspiration capacity : 25 à 250 m³/h

Control : Control:Automatic  system via a 18 cm touch screen, software in French, of the Windows type, highly intuitive, very user-friendly.

Technical data Tetra 30 / 50 version 2

Dimensions of the system : L  600 mm, H 1700 mm, D 800 mm // L  600 mm, H 2100 mm, D 800 mm

  • TETRA 30 :

Material of the chamberStainless steel

Dimensions of the chamber: L 305 mm, H 305 mm, D 370 mm

Part support: 1 to 4 platforms

Volume of the chamber : about 34 litres

Material of the chamber : Stainless steel

Dimensions of the chamber : L 400 mm, H 140 mm, D 625 mm

Part support: 1 to 4 platforms

Volume of the chamber : about 35 litres

Material of the chamber : Aluminium

Dimensions of the chamber : L 305 mm, H 300 mm, D 370 mm

Part support: 1 to 4 platforms

Volume of the chamber : about 35 litres

Dimensions of the chamber : Ø 280 mm D 325 mm

Part supportRotary drum

Volume of the chamber : about 34 litres

  • TETRA 50 :

Material of the chamberStainless steel

Dimensions of the chamber : L 305 mm, H 300 mm, P 625 mm

Part support: 1 to 4 platforms

Volume of the chamber : about 50 litres

Material of the chamber : Aluminium

Dimensions of the chamber : L 305 mm, H 300 mm, P 620 mm

Part support: 1 to 4 platforms

Volume of the chamber : about 50 litres

Dimensions of the chamber : Ø 280 mm D 540 mm

Part supportRotary drum

Volume of the chamber : about 50 litres

Gas power supply : 1 to 4 gas channels adjustable by mass flow controller (MFC)

Generator : 40/80 kHz / 1000W to 3000W or 13,56 MHz / 300W or 2,45 GHz / 850W

Vacuum pump  : Aspiration capacity : 25 à 250 m³/h

Control : Control:Automatic  system via a 43 cm touch screen, software in French, of the Windows type, highly intuitive, very user-friendly.

Please contact us for any technical questions