Etching a surface with a gas from an active process. The material is removed, vaporised and evacuated by pumping.

Applications :

  • Structuring of silicon
  • Improvement of adhesion, bonding and finishing for high-temperature plastics such as PTFE, PFA and FEP.

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Silicon with an etching mask before plasma treatment.

aetzen2

During the plasma treatment.

aetzen3

After the plasma treatment.

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POM example: before plasma treatment

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After the plasma treatment.