Parylene P6
Materials deposited: Parylene N, C, D, F-VT4
Range of thicknesses: 0.05 to 20 micrometres
Dimensions of the system: L 700 mm, H 700 mm, P 500 mm
Dimensions of the chamber: Ø 200 mm, H 200 mm
Pyrolysis: 1.6 kW / max 750 °C
Carousel: Ø 170 mm, H 170 mm
Liquid nitrogen trap: N2 liquid
Vacuum pump: Aspiration capacity: 16 m3/h
Limit vacuum: 1 x 10-3 mbar
Control: The software under Windows and the fifteen inch touch screen provide intuitive use of the equipment either automatically or manually.
Connections:
230 V / 16 A / 50-60 Hz
Compressed air: clean, dry, de-oiled: 6 bars
Pump discharge: Pipe of 20 mm interior diameter