PRODUCTION OF SPECIAL PLASMA SYSTEMS

Plasma etcher Tetra 2 PC - ROLL TO ROLL

Dimensions of the system: L 3491 mm, H 1000 mm, P 1278 mm

Dimensions of the chamber: Ø 90 mm, P 1050 mm

Volume of the chamber: about 2 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 2 units (each at 40 kHz) (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Automation: Continuous treatment in passing, of the “Roll-to-Roll” type.

Plasma etcher Tetra 15 LF PC

Electrical cabinet (with control):  L 600 mm, H 1700 mm, P 800 mm

Dimensions of the chamber: L 360 mm, H 150 mm, P 260 mm

Volume of the chamber: about 15 litres

Gas power supply : 2 gas channels adjustable by mass flow meters

Generator: 2 units (each at 40 kHz) (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 30 LF PC

Electrical cabinet (with control):  L 800 mm, H 600 mm, D 500 mm

Dimensions of the chamber: L 240 mm, H 150 mm, D 240 mm

Volume of the chamber: about 30 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Automation: This system may be integrated into a production line.

Plasma etcher Tetra 100 LF PC

Electrical cabinet (with control):  L 2000 mm, H 2200 mm, D 2000 mm

Dimensions of the chamber: L 700 mm, H 200 mm, D 700 mm

Volume of the chamber: about 100 litres

Gas power supply: 3 gas channels adjustable by mass flow meters

Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Automation: This system has a “drawer door”.

Plasma etcher Tetra 120 LF PC

Electrical cabinet (with control):  L 600 mm, H 2150 mm, D 1000 mm

Dimensions of the chamber: L 1200 mm, H 150 mm, D 1700 mm

Volume of the chamber: about 120 litres

Gas power supply: 4 gas channels adjustable by mass flow meters

Generator: 2 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Automation: This system has an automatic door.

Plasma etcher Tetra 130 LF PC

Electrical cabinet (with control):  L 1800 mm, H 2100 mm, D 1300 mm

Dimensions of the chamber: L 400 mm, H 400 mm, D 810 mm

Volume of the chamber : about 130 litres

Gas power supply : 3 gas channels adjustable by mass flow meters

Generator: 2 units at 13.56 MHz (optional: 40 kHz)

Control: By PC (Windows) with industrial bus

Specific properties: Area of the ultra-high vacuum (UHV) reached through a turbo-molecular pump.

Plasma etcher Tetra 140 LF PC

Electrical cabinet (with control):  L 600 mm, H 2100 mm, D 650 mm

Dimensions of the chamber: L 1200 mm, H 700 mm, D 1500 mm

Volume of the chamber: about 140 litres

Gas power supply: 3 gas channels adjustable by mass flow meters

Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 140 LF PC V2

Electrical cabinet (with control):  L 1000 mm, H 1800 mm, D 1000 mm

Dimensions of the chamber: L 1000 mm, H 100 mm, D 1400 mm

Volume of the chamber: about 140 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 150 LF PC

Electrical cabinet (with control):  L 1000 mm, H 2100 mm, D 1000 mm

Dimensions of the chamber: L 400 mm, H 600 mm, D 625 mm

Volume of the chamber: about 150 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Automation: Continuous “roll-to-roll” treatment for strips 400 mm wide and rolls of 300 mm diameter.

Plasma etcher Tetra 185 LF PC ‘desmearing’

Electrical cabinet (with control):  L 600 mm, H 2100 mm, D 1000 mm

Dimensions of the chamber: L 400 mm, H 665 mm, D 700 mm

Volume of the chamber: about 185 litres

Gas power supply: 4 gas channels adjustable by mass flow meters

Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

• ‘Desmearing’* miscellaneous materials.

• Surface cleaning

Activation of metallic surfaces

• 7 bays for simultaneously processing 7 plates.

• Treatment in production of plates before cutting at 460 x 610 mm

* ‘Desmearing’: a specific term designating the micro-smoothing of the edges of holes made conventionally or by LASER (charred residue).

Plasma etcher Tetra 210 LF PC

Electrical cabinet (with control):  L 1560 mm, H 2350 mm, D 1860 mm

Dimensions of the chamber: L 1000 mm, H 200 mm,DP 1400 mm

Volume of the chamber: about 210 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 240 LF PC

Electrical cabinet (with control):  L 600 mm, H 1700 mm, D 3200 mm

Dimensions of the chamber: L 305 mm, H 300 mm, D 2600 mm

Volume of the chamber: about 240 litres

Gas power supply: 3 gas channels adjustable by mass flow meters

Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 260 LF PC

Electrical cabinet (with control):  L 2500 mm, H 2200 mm, D 1000 mm

Dimensions of the chamber: L 650 mm, H 500 mm, D 800 mm

Volume of the chamber: about 260 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 10 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 375 LF PC

Electrical cabinet (with control):  L 600 mm, H 2100 mm, D 800 mm

Dimensions of the chamber: L 600 mm, H 360 mm, D 1900 mm

Volume of the chamber: about 375 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 2 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 400 LF PC

Electrical cabinet (with control):  L 600 mm, H 2100 mm, P 650 mm

Dimensions of the chamber: L 915 mm, H 750 mm, P 725 mm

Volume of the chamber: about 400 litres

Gas power supply: 3 gas channels adjustable by mass flow meters

Generator: 2 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Automation: The system has an automatic sliding door

Plasma etcher Tetra 420 LF PC

Electrical cabinet (with control):  L 1600 mm, H 2100 mm, D 1200 mm

Dimensions of the chamber: L 750 mm, H 800 mm, D 750 mm

Volume of the chamber: about 420 litres

Gas power supply: 4 gas channels adjustable by mass flow meters

Generator: 4 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 500 LF PC

Electrical cabinet (with control):  L 600 mm, H 2100 mm, P 800 mm

Dimensions of the chamber: L 1500 mm, H 1700 mm, P 200 mm

Volume of the chamber: about 500 litres

Gas power supply: 3 gas channels adjustable by mass flow meters

Generator: 2 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Substrate holder: 2 systems for continuous “Roll-to-roll” treatment.

Control – actuation by PC (Windows) with industrial bus

Plasma etcher Tetra 575 LF PC

Electrical cabinet (with control): L 1150 mm, H 1900 mm, D 1600 mm

Dimensions of the chamber: L 600 mm, H 1200 mm, D 800 mm

Volume of the chamber: about 575 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Substrate holder: 22 levels per substrate holder (adjustable)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 600 LF PC

Dimensions of the system: L 600 mm, H 2200 mm, D 1200 mm

Dimensions of the chamber: L 810 mm, H 810 mm, D 925 mm

Volume of the chamber: about 600 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 2 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 600 LF PC V1

Electrical cabinet (with control):  L 600 mm, H 2200 mm, P 800 mm

Dimensions of the chamber: L 1000 mm, H 1000 mm, P 600 mm

Volume of the chamber: about 600 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 2 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Substrate holder: 22 levels per substrate holder

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 600 LF PC V2

Electrical cabinet (with control):  L 1800 mm, H 1800 mm, D 800 mm

Dimensions of the chamber: L 580 mm, H 730 mm, D 1000 mm

Volume of the chamber: about 600 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 1 unit with automatic impedance matching system

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 600 LF PC avec tonneau rotatif V1

Electrical cabinet (with control):  L 600 mm, H 2200 mm, D 800 mm

Dimensions of the chamber: ∅ 1100 mm, D 700 mm

Volume of the chamber: about 600 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 2 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Substrate holder: rotary drum (with 4 baskets each with a volume of 30 litres)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 850 LF PC

Electrical cabinet (with control):  L 1500 mm, H 2000 mm, D 800 mm

Dimensions of the chamber: L 1300 mm, H 1800 mm, D 400 mm

Volume of the chamber: about 850 litres

Gas power supply: 3 gas channels adjustable by mass flow meters

Generator: 1 unit at 40 kHz

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 1200 LF PC

Electrical cabinet (with control):  L 1000 mm, H 1000 mm, D 1800 mm

Dimensions of the chamber: L 600 mm, H 1000 mm, D 2000 mm

Volume of the chamber: about 1200 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 3 unit at 40 kHz

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 2000 RF PC

Dimensions of the chamber:  L 1000 mm, H 2000 mm, D 1000 mm

Volume of the chamber: about 2000 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 1 unit at 13.56 MHz

Substrate holders: More than 10 substrate holders

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 2400 LF PC

Electrical cabinet (with control):  L 600 mm, H 2200 mm, D 800 mm

Dimensions of the chamber: ∅ 1100, D 2500 mm

Volume of the chamber: about 2400 litres

Gas power supply: 3 gas channels adjustable by mass flow meters

Generator: 4 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Substrate holdersRotary drum (including 16 baskets with a volume of 30 litres each)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 4400 LF PC

Electrical cabinet (with control):  L 1800 mm, H 1000 mm, D 800 mm

Dimensions of the chamber: L 1350 mm, H 2600 mm, D 1250 mm

Volume of the chamber: about 4400 litres

Gas power supply: 3 gas channels adjustable by mass flow meters

Generator: 4 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 5600 LF PC

Electrical cabinet (with control):  L 1800 mm, H 2200 mm, D 1800 mm

Dimensions of the chamber: L 2250 mm, H 2450 mm, D 1000 mm

Volume of the chamber: about 5600 litres

Gas power supply: 3 gas channels adjustable by mass flow meters

Generator: 6 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Substrate holder: Loading on a trolley fitted on rails (optional: Special drum)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 7000 LF PC

Electrical cabinet (with control):  L 2400 mm, H 2300 mm, D 1000 mm

Dimensions of the chamber: L 2400 mm, H 2100 mm, D 1400 mm

Volume of the chamber: about 7000 litres

Gas power supply: 3 gas channels adjustable by mass flow meters

Generator: 4 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 7300 LF PC

Electrical cabinet (with control):  L 600 mm, H 2100 mm, D 1200 mm

Dimensions of the chamber: L 1400 mm, H 2100 mm, D 2500 mm

Volume of the chamber: about 7300 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 2 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 7500 LF PC

Electrical cabinet (with control):  L 3000 mm, H 2000 mm, P 1000 mm

Dimensions of the chamber: L 1500 mm, H 2500 mm, P 2000 mm

Volume of the chamber: about 7500 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 6 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 8000 LF PC

Electrical cabinet (with control):  L 2000 mm, H 1800 mm, D 1000 mm

Dimensions of the chamber: L 1700 mm, H 2800 mm, D 1700 mm

Volume of the chamber: about 8000 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 4 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Control: By PC (Windows) with industrial bus

Plasma etcher Tetra 12600 LF PC

Electrical cabinet (with control):  L 1200 mm, H 2200 mm, D 800 mm

Dimensions of the chamber: L 2400 mm, H 2100 mm, D 2500 mm

Volume of the chamber: about 12600 litres

Gas power supply: 2 gas channels adjustable by mass flow meters

Generator: 6 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)

Substrate holder: Loading on a trolley on rails

Control: By PC (Windows) with industrial bus