PRODUCTION OF SPECIAL PLASMA SYSTEMS
Plasma etcher Tetra 2 PC - ROLL TO ROLL
Dimensions of the system: L 3491 mm, H 1000 mm, P 1278 mm
Dimensions of the chamber: Ø 90 mm, P 1050 mm
Volume of the chamber: about 2 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 2 units (each at 40 kHz) (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Automation: Continuous treatment in passing, of the “Roll-to-Roll” type.
Plasma etcher Tetra 15 LF PC
Electrical cabinet (with control): L 600 mm, H 1700 mm, P 800 mm
Dimensions of the chamber: L 360 mm, H 150 mm, P 260 mm
Volume of the chamber: about 15 litres
Gas power supply : 2 gas channels adjustable by mass flow meters
Generator: 2 units (each at 40 kHz) (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 30 LF PC
Electrical cabinet (with control): L 800 mm, H 600 mm, D 500 mm
Dimensions of the chamber: L 240 mm, H 150 mm, D 240 mm
Volume of the chamber: about 30 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Automation: This system may be integrated into a production line.
Plasma etcher Tetra 100 LF PC
Electrical cabinet (with control): L 2000 mm, H 2200 mm, D 2000 mm
Dimensions of the chamber: L 700 mm, H 200 mm, D 700 mm
Volume of the chamber: about 100 litres
Gas power supply: 3 gas channels adjustable by mass flow meters
Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Automation: This system has a “drawer door”.
Plasma etcher Tetra 120 LF PC
Electrical cabinet (with control): L 600 mm, H 2150 mm, D 1000 mm
Dimensions of the chamber: L 1200 mm, H 150 mm, D 1700 mm
Volume of the chamber: about 120 litres
Gas power supply: 4 gas channels adjustable by mass flow meters
Generator: 2 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Automation: This system has an automatic door.
Plasma etcher Tetra 130 LF PC
Electrical cabinet (with control): L 1800 mm, H 2100 mm, D 1300 mm
Dimensions of the chamber: L 400 mm, H 400 mm, D 810 mm
Volume of the chamber : about 130 litres
Gas power supply : 3 gas channels adjustable by mass flow meters
Generator: 2 units at 13.56 MHz (optional: 40 kHz)
Control: By PC (Windows) with industrial bus
Specific properties: Area of the ultra-high vacuum (UHV) reached through a turbo-molecular pump.
Plasma etcher Tetra 140 LF PC
Electrical cabinet (with control): L 600 mm, H 2100 mm, D 650 mm
Dimensions of the chamber: L 1200 mm, H 700 mm, D 1500 mm
Volume of the chamber: about 140 litres
Gas power supply: 3 gas channels adjustable by mass flow meters
Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 140 LF PC V2
Electrical cabinet (with control): L 1000 mm, H 1800 mm, D 1000 mm
Dimensions of the chamber: L 1000 mm, H 100 mm, D 1400 mm
Volume of the chamber: about 140 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 150 LF PC
Electrical cabinet (with control): L 1000 mm, H 2100 mm, D 1000 mm
Dimensions of the chamber: L 400 mm, H 600 mm, D 625 mm
Volume of the chamber: about 150 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Automation: Continuous “roll-to-roll” treatment for strips 400 mm wide and rolls of 300 mm diameter.
Plasma etcher Tetra 185 LF PC ‘desmearing’
Electrical cabinet (with control): L 600 mm, H 2100 mm, D 1000 mm
Dimensions of the chamber: L 400 mm, H 665 mm, D 700 mm
Volume of the chamber: about 185 litres
Gas power supply: 4 gas channels adjustable by mass flow meters
Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
• ‘Desmearing’* miscellaneous materials.
• Surface cleaning
• Activation of metallic surfaces
• 7 bays for simultaneously processing 7 plates.
• Treatment in production of plates before cutting at 460 x 610 mm
* ‘Desmearing’: a specific term designating the micro-smoothing of the edges of holes made conventionally or by LASER (charred residue).
Plasma etcher Tetra 210 LF PC
Electrical cabinet (with control): L 1560 mm, H 2350 mm, D 1860 mm
Dimensions of the chamber: L 1000 mm, H 200 mm,DP 1400 mm
Volume of the chamber: about 210 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 240 LF PC
Electrical cabinet (with control): L 600 mm, H 1700 mm, D 3200 mm
Dimensions of the chamber: L 305 mm, H 300 mm, D 2600 mm
Volume of the chamber: about 240 litres
Gas power supply: 3 gas channels adjustable by mass flow meters
Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 260 LF PC
Electrical cabinet (with control): L 2500 mm, H 2200 mm, D 1000 mm
Dimensions of the chamber: L 650 mm, H 500 mm, D 800 mm
Volume of the chamber: about 260 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 10 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 375 LF PC
Electrical cabinet (with control): L 600 mm, H 2100 mm, D 800 mm
Dimensions of the chamber: L 600 mm, H 360 mm, D 1900 mm
Volume of the chamber: about 375 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 2 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 400 LF PC
Electrical cabinet (with control): L 600 mm, H 2100 mm, P 650 mm
Dimensions of the chamber: L 915 mm, H 750 mm, P 725 mm
Volume of the chamber: about 400 litres
Gas power supply: 3 gas channels adjustable by mass flow meters
Generator: 2 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Automation: The system has an automatic sliding door
Plasma etcher Tetra 420 LF PC
Electrical cabinet (with control): L 1600 mm, H 2100 mm, D 1200 mm
Dimensions of the chamber: L 750 mm, H 800 mm, D 750 mm
Volume of the chamber: about 420 litres
Gas power supply: 4 gas channels adjustable by mass flow meters
Generator: 4 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 500 LF PC
Electrical cabinet (with control): L 600 mm, H 2100 mm, P 800 mm
Dimensions of the chamber: L 1500 mm, H 1700 mm, P 200 mm
Volume of the chamber: about 500 litres
Gas power supply: 3 gas channels adjustable by mass flow meters
Generator: 2 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Substrate holder: 2 systems for continuous “Roll-to-roll” treatment.
Control – actuation by PC (Windows) with industrial bus
Plasma etcher Tetra 575 LF PC
Electrical cabinet (with control): L 1150 mm, H 1900 mm, D 1600 mm
Dimensions of the chamber: L 600 mm, H 1200 mm, D 800 mm
Volume of the chamber: about 575 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 1 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Substrate holder: 22 levels per substrate holder (adjustable)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 600 LF PC
Dimensions of the system: L 600 mm, H 2200 mm, D 1200 mm
Dimensions of the chamber: L 810 mm, H 810 mm, D 925 mm
Volume of the chamber: about 600 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 2 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 600 LF PC V1
Electrical cabinet (with control): L 600 mm, H 2200 mm, P 800 mm
Dimensions of the chamber: L 1000 mm, H 1000 mm, P 600 mm
Volume of the chamber: about 600 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 2 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Substrate holder: 22 levels per substrate holder
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 600 LF PC V2
Electrical cabinet (with control): L 1800 mm, H 1800 mm, D 800 mm
Dimensions of the chamber: L 580 mm, H 730 mm, D 1000 mm
Volume of the chamber: about 600 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 1 unit with automatic impedance matching system
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 600 LF PC avec tonneau rotatif V1
Electrical cabinet (with control): L 600 mm, H 2200 mm, D 800 mm
Dimensions of the chamber: ∅ 1100 mm, D 700 mm
Volume of the chamber: about 600 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 2 unit at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Substrate holder: rotary drum (with 4 baskets each with a volume of 30 litres)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 850 LF PC
Electrical cabinet (with control): L 1500 mm, H 2000 mm, D 800 mm
Dimensions of the chamber: L 1300 mm, H 1800 mm, D 400 mm
Volume of the chamber: about 850 litres
Gas power supply: 3 gas channels adjustable by mass flow meters
Generator: 1 unit at 40 kHz
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 1200 LF PC
Electrical cabinet (with control): L 1000 mm, H 1000 mm, D 1800 mm
Dimensions of the chamber: L 600 mm, H 1000 mm, D 2000 mm
Volume of the chamber: about 1200 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 3 unit at 40 kHz
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 2000 RF PC
Dimensions of the chamber: L 1000 mm, H 2000 mm, D 1000 mm
Volume of the chamber: about 2000 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 1 unit at 13.56 MHz
Substrate holders: More than 10 substrate holders
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 2400 LF PC
Electrical cabinet (with control): L 600 mm, H 2200 mm, D 800 mm
Dimensions of the chamber: ∅ 1100, D 2500 mm
Volume of the chamber: about 2400 litres
Gas power supply: 3 gas channels adjustable by mass flow meters
Generator: 4 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Substrate holders: Rotary drum (including 16 baskets with a volume of 30 litres each)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 4400 LF PC
Electrical cabinet (with control): L 1800 mm, H 1000 mm, D 800 mm
Dimensions of the chamber: L 1350 mm, H 2600 mm, D 1250 mm
Volume of the chamber: about 4400 litres
Gas power supply: 3 gas channels adjustable by mass flow meters
Generator: 4 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 5600 LF PC
Electrical cabinet (with control): L 1800 mm, H 2200 mm, D 1800 mm
Dimensions of the chamber: L 2250 mm, H 2450 mm, D 1000 mm
Volume of the chamber: about 5600 litres
Gas power supply: 3 gas channels adjustable by mass flow meters
Generator: 6 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Substrate holder: Loading on a trolley fitted on rails (optional: Special drum)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 7000 LF PC
Electrical cabinet (with control): L 2400 mm, H 2300 mm, D 1000 mm
Dimensions of the chamber: L 2400 mm, H 2100 mm, D 1400 mm
Volume of the chamber: about 7000 litres
Gas power supply: 3 gas channels adjustable by mass flow meters
Generator: 4 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 7300 LF PC
Electrical cabinet (with control): L 600 mm, H 2100 mm, D 1200 mm
Dimensions of the chamber: L 1400 mm, H 2100 mm, D 2500 mm
Volume of the chamber: about 7300 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 2 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 7500 LF PC
Electrical cabinet (with control): L 3000 mm, H 2000 mm, P 1000 mm
Dimensions of the chamber: L 1500 mm, H 2500 mm, P 2000 mm
Volume of the chamber: about 7500 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 6 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 8000 LF PC
Electrical cabinet (with control): L 2000 mm, H 1800 mm, D 1000 mm
Dimensions of the chamber: L 1700 mm, H 2800 mm, D 1700 mm
Volume of the chamber: about 8000 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 4 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Control: By PC (Windows) with industrial bus
Plasma etcher Tetra 12600 LF PC
Electrical cabinet (with control): L 1200 mm, H 2200 mm, D 800 mm
Dimensions of the chamber: L 2400 mm, H 2100 mm, D 2500 mm
Volume of the chamber: about 12600 litres
Gas power supply: 2 gas channels adjustable by mass flow meters
Generator: 6 units each at 40 kHz (optional: 13.56 MHz or 2.45 GHz)
Substrate holder: Loading on a trolley on rails
Control: By PC (Windows) with industrial bus