When a gas (such as hexamethyldisiloxane (HMDSO), hexamethyldisilazane (HMDSN) or tetraethylene glycol dimethyl ether) is introduced into the chamber, due to the plasma polymerisation, a layer is deposited on the surface.
Applications :
- Deposit of hydrophobic layers
- Deposit of hydrophilic layers
- Deposit of diffusion barriers
Before plasma treatment
During plasma treatment
After plasma treatment