Parylene P260
Materials deposited: Parylene N, C, D, F-VT4, F-AF4
Range of thicknesses: 0.05 to 100 micrometres
Dimensions of the system: L 2600 mm, H 2000 mm, D 1000 mm
Dimensions of the chamber: Ø 640 mm, L 800 mm
Dimensions of the carousel: Ø 560 mm, L 650 mm
Pyrolysis: 4 kW / max 850 °C
Liquid nitrogen trap: N2 liquid
Vacuum pump: Aspiration capacity: 1800 m3/h
Limit vacuum: 1 x 10-3 mbar
Control: The software under Windows and the fifteen inch touch screen provide intuitive use of the equipment either automatically or manually.
Power supply: 3 Phases / 400 V AC / 32 A / 50-60 Hz
Compressed air: clean, dry, de-oiled: 6 bars
Pump discharge: Pipe of 42 mm interior diameter