ATTO PLASMA SYSTEM – LOW COST PLASMA CLEANER
Description of the system
Applications :
The Atto Plasma System s a semi-automatic laboratory plasma system with a capacity of 10.5 litres used in the following domains :
- Micro-fluidics (PDMS)
- analysis (SEM, TEM)
- medical
- research and development
- textile processing
- semiconductors
- plastic processing
Point at the image to see the different versions.
Dimensions of the system: L 525 mm, H 275 mm, D 450 mm
Dimensions of the chamber : Ø 211 mm, D 300 mm
Material of the chamber : Glass or quartz
Volume of the chamber : about 10.5 litres
Gas power supply : 2 gas channels adjustable by needle valve
Generator : 40kHz/200W ou 13.56 MHz/300W automatic matching
Vacuum pump : Contact us
Part support : 1 platform
Control : manual system, the duration of treatment is controlled by a programmable / analogue clock.
Dimensions of the system: L 525 mm, H 275 mm, D 450 mm
Dimensions of the chamber : Ø 211 mm, D 300 mm
Material of the chamber : Glass or quartz
Volume of the chamber : about 10.5 litres
Gas power supply : 2 gas channels adjustable by needle valve
Generator : 40kHz/200W ou 13.56 MHz/300W automatic matching
Vacuum pump : Contact us
Part support : 1 platform
Control : manual system, the duration of treatment is controlled by a programmable / analogue clock.
Dimensions of the system: L 525 mm, H 275 mm, D 450 mm
Dimensions of the chamber : Ø 211 mm, D 300 mm
Material of the chamber : Glass or quartz
Volume of the chamber : about 10.5 litres
Gas power supply : 1 to 2 gas channels adjustable by mass flow controllers (MFC)
Generator : 40kHz/200W ou 13.56 MHz/300W automatic matching
Vacuum pump : Contact us
Part support : 1 platform
Control :The system is controlled by a PC with an integrated 7 inch touch screen (multi-stage program, real-time diagram, data backup)
Dimensions of the system: L 525 mm, H 275 mm, D 450 mm
Dimensions of the chamber : Ø 211 mm, D 300 mm
Material of the chamber : Glass or quartz
Volume of the chamber : about 10.5 litres
Gas power supply : 1 to 2 gas channels adjustable by mass flow controllers (MFC)
Generator : 40kHz/200W ou 13.56 MHz/300W automatic matching
Vacuum pump : Contact us
Part support : 1 platform
Control :The system is controlled by a PC (Windows 10 ) with an integrated 7 inch touch screen (multi-stage program, real-time diagram, data backup)
Dimensions of the system: L 525 mm, H 275 mm, D 450 mm
Dimensions of the chamber : Ø 211 mm, D 300 mm
Material of the chamber : Glass or quartz
Volume of the chamber : about 10.5 litres
Gas power supply : 1 to 2 gas channels adjustable by mass flow controllers (MFC)
Generator : 40kHz/200W ou 13.56 MHz/300W automatic matching
Vacuum pump : Contact us
Part support : 1 platform
Control :The system is controlled by a PC (provided by the customer ) with an integrated 7 inch touch screen (multi-stage program, real-time diagram, data backup)