ATTO PLASMA SYSTEM – LOW COST PLASMA CLEANER

Description of the system

Applications :

The Atto Plasma System s a semi-automatic laboratory plasma system with a capacity of 10.5 litres used in the following domains :

  • Micro-fluidics (PDMS)
  • analysis (SEM, TEM)
  • medical
  • research and development
  • textile processing
  • semiconductors
  • plastic processing

Point at the image to see the different versions.

Atto version 1 technical data

Dimensions of the system: L 525 mm, H 275 mm, D 450 mm

Dimensions of the chamber : Ø 211 mm, D 300 mm

Material of the chamber : Glass or quartz

Volume of the chamber : about 10.5 litres

Gas power supply :  2 gas channels adjustable by needle valve

Generator : 40kHz/200W ou 13.56 MHz/300W automatic matching

Vacuum pump : Contact us

Part support : 1 platform

Control : manual system, the duration of treatment is controlled by a programmable / analogue clock.

Atto version 2 technical data

Dimensions of the system: L 525 mm, H 275 mm, D 450 mm

Dimensions of the chamber : Ø 211 mm, D 300 mm

Material of the chamber : Glass or quartz

Volume of the chamber : about 10.5 litres

Gas power supply :  2 gas channels adjustable by needle valve

Generator : 40kHz/200W ou 13.56 MHz/300W automatic matching

Vacuum pump : Contact us

Part support : 1 platform

Control : manual system, the duration of treatment is controlled by a programmable / analogue clock.

Atto version 3 technical data

Dimensions of the system: L 525 mm, H 275 mm, D 450 mm

Dimensions of the chamber : Ø 211 mm, D 300 mm

Material of the chamber : Glass or quartz

Volume of the chamber : about 10.5 litres

Gas power supply :  1 to 2 gas channels adjustable by mass flow controllers (MFC)

Generator : 40kHz/200W ou 13.56 MHz/300W automatic matching

Vacuum pump : Contact us

Part support : 1 platform

Control :The system is controlled by a PC with an integrated 7 inch touch screen (multi-stage program, real-time diagram, data backup)

Atto version 4 technical data

Dimensions of the system: L 525 mm, H 275 mm, D 450 mm

Dimensions of the chamber : Ø 211 mm, D 300 mm

Material of the chamber : Glass or quartz

Volume of the chamber : about 10.5 litres

Gas power supply :  1 to 2 gas channels adjustable by mass flow controllers (MFC)

Generator : 40kHz/200W ou 13.56 MHz/300W automatic matching

Vacuum pump : Contact us

Part support : 1 platform

Control :The system is controlled by a PC (Windows 10 ) with an integrated 7 inch touch screen (multi-stage program, real-time diagram, data backup)

Atto version 5 technical data

Dimensions of the system: L 525 mm, H 275 mm, D 450 mm

Dimensions of the chamber : Ø 211 mm, D 300 mm

Material of the chamber : Glass or quartz

Volume of the chamber : about 10.5 litres

Gas power supply :  1 to 2 gas channels adjustable by mass flow controllers (MFC)

Generator : 40kHz/200W ou 13.56 MHz/300W automatic matching

Vacuum pump : Contact us

Part support : 1 platform

Control :The system is controlled by a PC (provided by the customer ) with an integrated 7 inch touch screen (multi-stage program, real-time diagram, data backup)