ZEPTO PLASMA SYSTEM – LOW COST PLASMA CLEANER

Description of the system

Applications :

The ZEPTO Plasma System is a semi-automatic laboratory plasma system with a capacity of 2.6 litres used in the following domains :

  • microfluidic (PDMS)
  • analysis (SEM, TEM)
  • medical
  • research and development
  • semiconductors
  • plastic processing

Point at the image to see the different versions.

Zepto version 1 technical data

Dimensions of the system: : L  425 mm, H 185 mm, D 450 mm

Dimensions of the chamber: : Ø 105 mm, D 300 mm

Material of the chamber : Glass or quartz

Volume of the chamber : about 2.6 litres

Gas power supply: 2 gas channels adjustable by needle valves

Generator : 40KHz/100W or 13.56 MHz/50W or 200W automatic matching

Vacuum pump : Contact us for more infos

Part support : 1 platform

Control : manual system, the duration of treatment is controlled by a programmable / analogue clock.

Zepto_Griff-1

Zepto version 2 technical data

Dimensions of the system: : L  425 mm, H 185 mm, D 450 mm

Dimensions of the chamber: : Ø 105 mm, D 300 mm

Material of the chamber : Glass or quartz

Volume of the chamber : about 2.6 litres

Gas power supply: 2 gas channels adjustable by needle valves

Generator : 40KHz/100W or 13.56 MHz or 200W automatic matching

Vacuum pump : Contact us for more infos

Part support : 1 platform

Control : manual system, the duration of treatment is controlled by a programmable / analogue clock.

Système ZEPTO

Zepto version 3 technical data

Dimensions of the system: : L  425 mm, H 185 mm, D 450 mm

Dimensions of the chamber: : Ø 105 mm, D 300 mm

Material of the chamber : Glass or quartz

Volume of the chamber : about 2.6 litres

Gas power supply: 2 channels adjustable by needle valves (MFC)

Generator : 40KHz/100W or 13.56 MHz/50W automatic matching

Vacuum pump : Contact us for more infos

Part support : 1 platform

Contrôle: The system is controlled by a PCCE with an integrated 7 inch touch screen

Technical data Zepto version 4, chamber 160 mm

Dimensions of the system: : L  425 mm, H 250 mm, D 450 mm

Dimensions of the chamber : Ø 160 mm, D 180 mm

Material of the chamber : Glass or quartz

Volume of the chamber : about. 4 litres

Gas supply :1 to 2 gas channels adjustable by mass flow controllers (MFC)

Generator : 40KHz/100W or 13.56 MHz/50W automatic matching

Vacuum pump : contact us for more information

Part support : 1 platform

Control :  The system is controlled by a PC with an integrated 7 inch touch screen (multi-stage program, real-time diagram, data backup)

Zepto version 5 technical data

Dimensions of the system: : L  425 mm, H 250 mm, D 450 mm

Dimensions of the chamber : Ø 160 mm, D 180 mm

Material of the chamber : Glass or quartz

Volume of the chamber : about 2.6 litres

Gas supply :1 to 2 gas channels adjustable by mass flow controllers (MFC)

Generator : 40KHz/100W or 13.56 MHz/50W automatic matching

Vacuum pump : contact us

Part support : 1 platform

Control :  The system is controlled by a PC (supply at the choice of the customer), multi-stage program, real-time diagram, data backup.

Technical data Zepto version 6 RIE

Adapted to the treatment of 6 inch wafers

Dimensions of the system : L  425 mm, H 310 mm, D 450 mm

Dimensions of the chamber : Ø 190mm, H 60 mm

Material of the chamber : Aluminium

Volume of the chamber : about 1 litre

Gas power supply : 2 gas channels controlled by needle valves

Generator : 40KHz/100W automatic matching

Vacuum pump: contact us

Control: manual system, the duration of treatment is controlled by a programmable / analogue clock.

Zepto RIE