PLASMA SYSTEM TETRA 100 LF – PLASMA ETCHER

Description of the system

Applications :

The TETRA 100 plasma system is a system for plasma activation and cleaning with a capacity of 100  litres used in the following domains:

  • analysis (SEM, TEM)
  • medical
  • sterilisationl
  • research and development
  • textile processing
  • semiconductors
  • treatment of plastic

Point at the image to see the different versions.

Données techniques Tetra 100 version 1

Dimensions of the system : L 600 mm, H 1700 mm, P 800 mm

Material of the chamberStainless steel

Dimensions of the chamber: L 305 mm, H 300 mm, D 370 mm

Part support: 1 to 6 platforms

Volume of the chamber: about 34 litres

Material of the chamberStainless steel

Dimensions of the chamber: L 400 mm, H 140 mm, D 625 mm

Part support: 1 to 6 platforms

Volume of the chamber: about 35 litres

Material of the chamberStainless steel

Dimensions of the chamber: L 305 mm, H 300 mm, D 625 mm

Part support: 1 to 6 platforms

Volume of the chamber: about 50 litres

Dimensions of the chamber: L 305 mm, H 300 mm, D 370 mm

Part supportRotary drum

Volume of the chamber: about 34 litres

Gas power supply: 2 to 6 gas channels adjustable by mass flow controller (MFC)

Generator: 100/80 kHz from 500 to 3000W – 13.56 MHz of 300W – 2.45 GHz of 600W

Vacuum pump: Aspiration capacity: 25 to 250 m³/h

Control: semi-automatic system, the duration of treatment is controlled by a programmable / analogue clock.

Données techniques Tetra 100 version 2

Dimensions of the system : L 600 mm, H 2100 mm, P 800 mm

Material of the chamberStainless steel

Dimensions of the chamber: L 305 mm, H 300 mm, D 370 mm

Part support: 1 to 6 platforms

Volume of the chamber: about 34 litres

Material of the chamberStainless steel

Dimensions of the chamber: L 400 mm, H 140 mm, D 625 mm

Part support: 1 to 6 platforms

Volume of the chamber: about 35 litres

Material of the chamberStainless steel

Dimensions of the chamber: L 305 mm, H 300 mm, D 625 mm

Part support: 1 to 6 platforms

Volume of the chamber: about 50 litres

Dimensions of the chamber: L 305 mm, H 300 mm, D 370 mm

Part supportRotary drum

Volume of the chamber: about 34 litres

Gas power supply: 2 to 6 gas channels adjustable by mass flow controller (MFC)

Generator: 100/80 kHz from 500 to 3000W – 13.56 MHz of 300W – 2.45 GHz of 600W

Vacuum pump: Aspiration capacity: 25 to 250 m³/h

Control: semi-automatic system, the duration of treatment is controlled by a programmable / analogue clock.