Parylene P260

Materials deposited: Parylene N, C, D, F-VT4, F-AF4

Range of thicknesses: 0.05 to 100 micrometres

Dimensions of the system: L 2600 mm, H 2000 mm, D 1000 mm

Dimensions of the chamber: Ø 640 mm, L 800 mm

Dimensions of the carousel: Ø 560 mm, L 650 mm

Pyrolysis: 4 kW / max 850 °C

Liquid nitrogen trap: N2 liquid

Vacuum pump: Aspiration capacity: 1800 m3/h

Limit vacuum: 1 x 10-3 mbar

Control: The software under Windows and the fifteen inch touch screen provide intuitive use of the equipment either automatically or manually.

Power supply: 3 Phases / 400 V AC / 32 A / 50-60 Hz

Compressed air: clean, dry, de-oiled: 6 bars

Pump discharge: Pipe of 42 mm interior diameter