Parylene P30

Technical data

Materials deposited : Parylene N, C, D, F-VT4

Range of thicknesses : 0.05 to 50 micrometres

Dimensions of the system : L 1400 mm, H 1700 mm, D 700 mm

Dimensions of the chamber : Ø 310 mm, H 500 mm

Pyrolysis : 2 kW / max 700 °C

Carousel : Ø 150 mm, H 270 mm

Liquid nitrogen trap : N2 liquid

Vacuum pump : Aspiration capacity: 25 m3/h

Limit vacuum : 1 x 10-3 mbar

Control : The software under Windows and the fifteen inch touch screen provide intuitive use of the equipment either automatically or manually.

Connections:

400 V / 16 A / 50-60 Hz

Compressed air: clean, dry, de-oiled: 6 bars

Pump discharge: Pipe of 25 mm interior diameter