PLASMA SYSTEM NANO – PLASMA CLEANER

 

Description of the system

Applications :

The Nano plasma system is a system for plasma activation and cleaning with a capacity of 18 to 34  litres used in the following domains:

  • medical
  • research and development
  • textile processing
  • semiconductors
  • treatment of plastic
  • electronics
Brochure NANO

  • v1

  • v2

  • v3

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Point at the image to see the different versions.

For any additional information, contact us

Nano version 1 technical data

Dimensions of the system: L 560 mm, H 600 mm, D 600 mm

Material of the chamber: Borosilicate / Quartz

Dimensions of the chamber : Ø 240 mm, D 400 mm

Part support: 1 platform

Material of the chamber: Stainless steel

Dimensions of the chamber: Ø 267 mm, P 420 mm

Part support: 1 platform

Material of the chamber: Stainless steel

Dimensions of the chamber: L 240 mm, H 240 mm, D 420 mm

Part support: 1 to 3 platforms

Material of the chamber: Aluminium

Dimensions of the chamber: L 240 mm, H 240 mm, D 420 mm

Volume of the chamber: 18 / 24 litres

Gas power supply :2 to 4 gas channels adjustable by mass flow controller (MFC)

Generator: 100 kHz/500W or 13,56 MHz/300W

Vacuum pump: Aspiration capacity: 16 to 65 m³/h

Control:Automatic from the system via a 18 cm touch screen, software in French, of the Windows type, highly intuitive, very user-friendly.

Nano version 2 technical data

Dimensions of the system: L 600 mm, H 1700 mm, D 800 mm

Material of the chamber: Borosilicate / Quartz

Dimensions of the chamber : Ø 240 mm, D 400 mm // Ø 240 mm, D 600 mm

Part support: 1 platform

Material of the chamber: Stainless steel

Dimensions of the chamber: L 240 mm, H 240 mm, D 420 mm // L 240 mm, H 240 mm, D 600 mm

Part support: 1 to 3 platform

Material of the chamber: Aluminium

Dimensions of the chamber: L 240 mm, H 240 mm, D 420 mm // L 240 mm, H 240 mm, D 600 mm

Part support: 1 to 3 platforms

Volume of the chamber: 18 / 34 litres

Gas power supply :2 to 4 gas channels adjustable by mass flow controller (MFC)

Generator: 00 kHz/500W or 80 kHz/1000W or 13,56 MHz/300W or 2,45 GHz / 600W

Vacuum pump: Aspiration capacity: 16 to 65 m³/h

Control:Automatic from the system via a 18 cm touch screen, software in French, of the Windows type, highly intuitive, very user-friendly.

 

Nano version 3 technical data

Dimensions of the system: L 600 mm, H 1700 mm, D 800 mm

Material of the chamber: Borosilicate / Quartz

Dimensions of the chamber : Ø 240 mm, D 400 mm // Ø 240 mm, D 600 mm

Part support: 1 platform

Material of the chamber: Stainless steel

Dimensions of the chamber: L 240 mm, H 240 mm, D 420 mm // L 240 mm, H 240 mm, D 600 mm

Part support: 1 to 3 platform

Material of the chamber: Aluminium

Dimensions of the chamber: L 240 mm, H 240 mm, D 420 mm // L 240 mm, H 240 mm, D 600 mm

Part support: 1 to 3 platforms

Volume of the chamber: 18 / 34 litres

Gas power supply :2 to 4 gas channels adjustable by mass flow controller (MFC)

Generator: 00 kHz/500W or 80 kHz/1000W or 13,56 MHz/300W or 2,45 GHz / 600W

Vacuum pump: Aspiration capacity: 16 to 65 m³/h

Control:Automatic from the system via a 43 cm touch screen, software in French, of the Windows type, highly intuitive, very user-friendly.

 

Please contact us for any technical questions.