PLASMA FEMTO SYSTEMS – PLASMA CLEANER

Description of the system

Applications :

The FEMTO Plasma System is a semi-automatic laboratory plasma system with a capacity of 2.6 litres used in the following domains :

  • analysis (SEM, TEM)
  • medical
  • Micro-fluidics (PDMS)
  • research and development
  • textile processing
  • semiconductors
  • plastic processing
  • Asbestos analysis

Point at the image to see the different versions.

Femto version 1 technical data

Dimensions of the system : L  320 mm, H 620 mm, P 600 mm

Material of the chamber : Borosilicate / Quartz

Dimensions of the chamber : Ø 95 mm, P 280 mm

Material of the chamberStainless steel

Dimensions of the chamber: L 103 mm, H 103 mm, P 285 mm

Material of the chamber : Aluminium

Dimensions of the chamber : L 110 mm, H 120 mm, P 300 mm

Gas power supply: : 2 gas channels adjustable by needle valve

Generator : 40kHz/100W ou 13,56 MHz/50W automatic matching

Vacuum pump : contact us

Part support: : 1 platform

Control : semi-automatic system, the duration of treatment is controlled by a programmable digital clock.

Femto version 2 technical data

Dimensions of the system : L  560 mm, H 220 mm, D 600 mm

Material of the chamber : Borosilicate / Quartz

Dimensions of the chamber : Ø 95 mm, D 280 mm

Material of the chamberStainless steel

Dimensions of the chamber : L 103 mm, H 103 mm, D 285 mm

Material of the chamber : Aluminium

Dimensions of the chamber : L 110 mm, H 120 mm, D 300 mm

Gas power supply : 2 gas channels adjustable by mass flow controller (MFC)

Generator : 40kHz/100W ou 13,56 MHz/50W/80W automatic matching

Vacuum pump : Contact us

Part support : 1 platform

Control : Automatic from the system via a 9 cm touch screen, software in French, of the Windows type, highly intuitive, very user-friendly.
 

Femto version 3 technical data

Dimensions of the system : L  560 mm, H 220 mm, P 600 mm

Material of the chamber : Borosilicate / Quartz

Dimensions of the chamber : Ø 95 mm, P 280 mm

Material of the chamber : Acier inoxydable

Dimensions of the chamber : L 103 mm, H 103 mm, P 285 mm

Material of the chamber : Aluminium

Dimensions of the chamber : L 110 mm, H 120 mm, P 300 mm

Gas power supply : 2 to 4 gas channels adjustable by mass flow controller (MFC)

Generator : 40kHz/100W ou 13,56 MHz/200W automatic matching

Vacuum Pump : contact us

Support de pièce : 1 platform

Control : Automatic from the system via a 9 cm touch screen, software in French, of the Windows type, highly intuitive, very user-friendly.
 

Femto 7PC

Femto version 4 technical data

Dimensions of the system : L  800 mm, H 1700 mm, P 600 mm

Material of the chamber : Borosilicate / Quartz

Dimensions of the chamber : Ø 95 mm, P 280 mm

Material of the chamber: Acier inoxydable

Dimensions of the chamber : L 103 mm, H 103 mm, P 285 mm

Material of the chamber : Aluminium

Dimensions of the chamber : L 110 mm, H 120 mm, P 300 mm

Gas power supply : 2 to 4 gas channels adjustable by mass flow controller (MFC)

Generator : 40kHz/100W ou 13,56 MHz/200W automatic matching or 2.45 GHz/300W

Vacuum pump : contact us

Part Support : 1 platform

Contrôle: Automatic from the system via a 18 cm touch screen, software in French, of the Windows type, highly intuitive, very user-friendly.
 

Please contact us for any technical questions.