PLASMA FEMTO SYSTEMS – PLASMA CLEANER
Description of the system
Applications :
The FEMTO Plasma System is a semi-automatic laboratory plasma system with a capacity of 2.6 litres used in the following domains :
- analysis (SEM, TEM)
- medical
- Micro-fluidics (PDMS)
- research and development
- textile processing
- semiconductors
- plastic processing
- Asbestos analysis
Point at the image to see the different versions.
Dimensions of the system : L 320 mm, H 620 mm, P 600 mm
Material of the chamber : Borosilicate / Quartz
Dimensions of the chamber : Ø 95 mm, P 280 mm
Material of the chamber : Stainless steel
Dimensions of the chamber: L 103 mm, H 103 mm, P 285 mm
Material of the chamber : Aluminium
Dimensions of the chamber : L 110 mm, H 120 mm, P 300 mm
Gas power supply: : 2 gas channels adjustable by needle valve
Generator : 40kHz/100W ou 13,56 MHz/50W automatic matching
Vacuum pump : contact us
Part support: : 1 platform
Control : semi-automatic system, the duration of treatment is controlled by a programmable digital clock.
Dimensions of the system : L 560 mm, H 220 mm, D 600 mm
Material of the chamber : Borosilicate / Quartz
Dimensions of the chamber : Ø 95 mm, D 280 mm
Material of the chamber : Stainless steel
Dimensions of the chamber : L 103 mm, H 103 mm, D 285 mm
Material of the chamber : Aluminium
Dimensions of the chamber : L 110 mm, H 120 mm, D 300 mm
Gas power supply : 2 gas channels adjustable by mass flow controller (MFC)
Generator : 40kHz/100W ou 13,56 MHz/50W/80W automatic matching
Vacuum pump : Contact us
Part support : 1 platform
Control : Automatic from the system via a 9 cm touch screen, software in French, of the Windows type, highly intuitive, very user-friendly.
Dimensions of the system : L 560 mm, H 220 mm, P 600 mm
Material of the chamber : Borosilicate / Quartz
Dimensions of the chamber : Ø 95 mm, P 280 mm
Material of the chamber : Acier inoxydable
Dimensions of the chamber : L 103 mm, H 103 mm, P 285 mm
Material of the chamber : Aluminium
Dimensions of the chamber : L 110 mm, H 120 mm, P 300 mm
Gas power supply : 2 to 4 gas channels adjustable by mass flow controller (MFC)
Generator : 40kHz/100W ou 13,56 MHz/200W automatic matching
Vacuum Pump : contact us
Support de pièce : 1 platform
Control : Automatic from the system via a 9 cm touch screen, software in French, of the Windows type, highly intuitive, very user-friendly.
Dimensions of the system : L 800 mm, H 1700 mm, P 600 mm
Material of the chamber : Borosilicate / Quartz
Dimensions of the chamber : Ø 95 mm, P 280 mm
Material of the chamber: Acier inoxydable
Dimensions of the chamber : L 103 mm, H 103 mm, P 285 mm
Material of the chamber : Aluminium
Dimensions of the chamber : L 110 mm, H 120 mm, P 300 mm
Gas power supply : 2 to 4 gas channels adjustable by mass flow controller (MFC)
Generator : 40kHz/100W ou 13,56 MHz/200W automatic matching or 2.45 GHz/300W
Vacuum pump : contact us
Part Support : 1 platform
Contrôle: Automatic from the system via a 18 cm touch screen, software in French, of the Windows type, highly intuitive, very user-friendly.
Please contact us for any technical questions.