When a gas (such as hexamethyldisiloxane (HMDSO), hexamethyldisilazane (HMDSN) or tetraethylene glycol dimethyl ether) is introduced into the chamber, due to the plasma polymerisation, a layer is deposited on the surface.

Applications :

  • Deposit of hydrophobic layers
  • Deposit of hydrophilic layers
  • Deposit of diffusion barriers

beschichten1

Before plasma treatment

beschichten2

During plasma treatment

beschichten3_en

After plasma treatment